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3D precision probe, sensor for CMM and coordinate measuring machine.

The Gannen XM is designed for measuring miniaturized components, without the risk of product damage. This allows measurements of small holes and 3D structures.

Gannen XM: measuring MEMS and micro components

The Gannen XM is the second probing system in our Gannen series of precision 3D tactile scanning probes. The system is optimized for true 3D measurements on micro components and MEMS is delivered with probing tips down to 50 micrometers in diameter.

For optimum measurement behavior and to prevent damaging the work piece, the probing forces with the Gannen-XM are in the micro-Newton range, with a stiffness at the probe tip down to 10 N/m. Both the mechanical and electrical coupling of the Gannen-XM is fully compatible with the Gannen-XP.

Micro spherical tips for use with the Gannen probe

The Gannen probe can be supplied with tip diameters down to 50 micrometer in diameter. Tip diameters of 120 micrometer or larger are available in a wide variety of materials, including sapphire, ruby and silicon nitride. The smaller tips are custom made using in-house EDM facilities.


General specifications
Repeatability * 4 nm
Measuring probe Yes
Suitable for scanning Yes
Available tip diameters 50, 120, 300 and 500 micrometer
Probe uncertainty
3D sensor uncertainty (k=3) ** 24 nm
Calibration of tip and probe *** 150 nm
Temperature deviations (ΔT < 0,1 K) < 20 nm
Tip and work piece deformation < 10 nm
Other deviations < 30 nm
Combined 3D uncertainty 156 nm
Contact forces
Colliding mass at the probe tip 45 mg
Stiffness at probe tip **** > 10 N/m (x,y)
> 50 N/m (z)
Typical contact force @ 1 micrometer > 0.01 mN
Measurement range 10 micrometer
Linear measurement range 10 micrometer

* standard deviation over the whole measurement range and in any direction, confirmed by independent publications

** The analysis is based on three times the standard deviation (k=3) and a maximum displacement of the sensor tip of 10 micrometers in a temperature controlled environment, where temperature variations are within plusminus 0,1 K

*** the stated value is mainly determined by machine uncertainty and calibration method

**** depends on stylus, for a stylus diameter above 0.2 mm the stiffness is 160 N/m in XY- and 400 N/m in Z-direction