Gannen XM: measuring MEMS and micro components
The Gannen XM is the second probing system in our Gannen series of precision 3D tactile scanning probes. The system is optimized for true 3D measurements on micro components and MEMS is delivered with probing tips down to 50 micrometers in diameter.
For optimum measurement behavior and to prevent damaging the work piece, the probing forces with the Gannen-XM are in the micro-Newton range, with a stiffness at the probe tip down to 10 N/m. Both the mechanical and electrical coupling of the Gannen-XM is fully compatible with the Gannen-XP.
Micro spherical tips for use with the Gannen probe
The Gannen probe can be supplied with tip diameters down to 50 micrometer in diameter. Tip diameters of 120 micrometer or larger are available in a wide variety of materials, including sapphire, ruby and silicon nitride. The smaller tips are custom made using in-house EDM facilities.
|Repeatability *||4 nm|
|Suitable for scanning||Yes|
|Available tip diameters||50, 120, 300 and 500 micrometer|
|3D sensor uncertainty (k=3) **||24 nm|
|Calibration of tip and probe ***||150 nm|
|Temperature deviations (ΔT < 0,1 K)||<||20 nm|
|Tip and work piece deformation||<||10 nm|
|Other deviations||<||30 nm|
|Combined 3D uncertainty||156 nm|
|Colliding mass at the probe tip||45 mg|
|Stiffness at probe tip ****||> 10 N/m (x,y)
> 50 N/m (z)
|Typical contact force @ 1 micrometer||> 0.01 mN|
|Measurement range||10 micrometer|
|Linear measurement range||10 micrometer|
* standard deviation over the whole measurement range and in any direction, confirmed by independent publications
** The analysis is based on three times the standard deviation (k=3) and a maximum displacement of the sensor tip of 10 micrometers in a temperature controlled environment, where temperature variations are within plusminus 0,1 K
*** the stated value is mainly determined by machine uncertainty and calibration method
**** depends on stylus, for a stylus diameter above 0.2 mm the stiffness is 160 N/m in XY- and 400 N/m in Z-direction